Step-function optical distributions in cross-sectional shifts measuring

Yuri G. Kirchin

doi:10.1117/12.57908

1 March 1992 Step-function optical distributions in cross-sectional shifts measuring

Yuri G. Kirchin

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Proceedings Volume 1603, Education in Optics; (1992) https://doi.org/10.1117/12.57908
Event: Education in Optics, 1991, Leningrad, Russian Federation

Abstract

The main principles of opto-electronic devices for fine cross—sectional shifts measuring based on the step-function (SF) optical distributions are discuss— ed. Basic mathematical method and its practical development are suggested.

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Yuri G. Kirchin "Step-function optical distributions in cross-sectional shifts measuring", Proc. SPIE 1603, Education in Optics, (1 March 1992); https://doi.org/10.1117/12.57908

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