1 January 1992 Improved performance of a CORE-2100 through a joint development program
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Abstract
New semiconductor device technologies demand ever tighter critical dimension (CD) control in mask and reticle production. With this in mind ATEQ and Micro Mask began a joint development program that led to changes in calibration and operating parameters, and several hardware replacements on the CORE-2100. This effort led to improvements in two technology modules key to the CORE-2564 product: the rotating polygonal mirror and the steering mirror servo loop. Analysis techniques used to identify error contributors include both linewidth and placement metrology. Both CORE-2100 and CORE-2500 product generations benefit from these improvements, especially in the area of isolated and packed pitch feature uniformity.
© (1992) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Brett Schafman, Claudia H. Geller, C. Edward Franks, "Improved performance of a CORE-2100 through a joint development program", Proc. SPIE 1604, 11th Annual BACUS Symposium on Photomask Technology, (1 January 1992); doi: 10.1117/12.56935; https://doi.org/10.1117/12.56935
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