Continuous vibration monitoring system at an operating microelectronics fabrication plant

Goutam Paul; Rajesh Mehta

doi:10.1117/12.56852

1 February 1992 Continuous vibration monitoring system at an operating microelectronics fabrication plant

Goutam Paul, Rajesh Mehta

Proceedings Volume 1619, Vibration Control in Microelectronics, Optics, and Metrology; (1992) https://doi.org/10.1117/12.56852
Event: SPIE Technical: OPTCON '91, 1991, San Jose, CA, United States

Abstract

Various construction activities were planned in an area next to Intel''s sub-micron microelectronics facility in Santa Clara. We needed to develop a system to ensure the continued operation of the process equipment during construction without any yield problems due to transmission of construction-related vibrations. A computer-based vibration monitoring system was devised and built which provides continuous measurements and is suitable for ''interactive'' as well as for ''archive'' use. In ''interactive'' use, alarm levels are set at two threshold values which were chosen from operating fabrication plant characteristics. Continuous data generation and its analysis with respect to the construction related activities gives a clear indication of harmful construction activities and equipment. The transmission ability of vibration through the existing type of soil and isolated grade slab construction is also studied. The dampening or amplifications of vibration levels with respect to location and distance from the source has been characterized and evaluated.

Citation Download Citation

Goutam Paul and Rajesh Mehta "Continuous vibration monitoring system at an operating microelectronics fabrication plant", Proc. SPIE 1619, Vibration Control in Microelectronics, Optics, and Metrology, (1 February 1992); https://doi.org/10.1117/12.56852

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available