1 February 1992 Continuous vibration monitoring system at an operating microelectronics fabrication plant
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Abstract
Various construction activities were planned in an area next to Intel''s sub-micron microelectronics facility in Santa Clara. We needed to develop a system to ensure the continued operation of the process equipment during construction without any yield problems due to transmission of construction-related vibrations. A computer-based vibration monitoring system was devised and built which provides continuous measurements and is suitable for ''interactive'' as well as for ''archive'' use. In ''interactive'' use, alarm levels are set at two threshold values which were chosen from operating fabrication plant characteristics. Continuous data generation and its analysis with respect to the construction related activities gives a clear indication of harmful construction activities and equipment. The transmission ability of vibration through the existing type of soil and isolated grade slab construction is also studied. The dampening or amplifications of vibration levels with respect to location and distance from the source has been characterized and evaluated.
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Goutam Paul, Goutam Paul, Rajesh Mehta, Rajesh Mehta, } "Continuous vibration monitoring system at an operating microelectronics fabrication plant", Proc. SPIE 1619, Vibration Control in Microelectronics, Optics, and Metrology, (1 February 1992); doi: 10.1117/12.56852; https://doi.org/10.1117/12.56852
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