1 February 1992 Generic criteria for vibration-sensitive equipment
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When designing facilities for research, microelectronics manufacturing and similar activities, it is generally necessary to have vibration criteria which are generic (i.e., applicable to classes of equipment and activity) rather than specific to particular items of equipment. This paper describes the derivation and use of one such set of criteria that is based on one-third octave band vibration velocity spectra. The paper also discusses the need to develop methods and standards for measuring the vibration sensitivity of equipment. Some examples are given which illustrate the considerable confusion in equipment sensitivity standards that exists at the present time. A plea is made to equipment manufacturers and users to develop and call for, respectively, specifications that are real and precise. This is especially important as the high- technology community enters the ''age of the nanometer.''
© (1992) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Colin G. Gordon, Colin G. Gordon, } "Generic criteria for vibration-sensitive equipment", Proc. SPIE 1619, Vibration Control in Microelectronics, Optics, and Metrology, (1 February 1992); doi: 10.1117/12.56826; https://doi.org/10.1117/12.56826

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