1 February 1992 Improved vibration isolation system for a scanning electron microscope
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High resolution scanning electron microscopes (SEMs) are placed in a wide variety of application sizes. The site environmental vibration levels can vary considerably due to geographical location. building construction, location within the building and any processes which may be running within or near the building. This paper briefly reviews the primary sources of mechanical disturbances which can have a detrimental effect on the resolution of the SEM showing the importance of considering the entire SEM structure. The use of finite element techniques to investigate system structural performance and its relevance to low frequency ''rigid body'' motion at nanometric levels is discussed together with an improved design of passive vibration isolation using a focalized system. In this method, the lines of action of the support forces are considered with regard to the position of the center of gravity of the supported structure.
© (1992) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Peter A. Jennings, John W. Willson, and Roy H. Bannister "Improved vibration isolation system for a scanning electron microscope", Proc. SPIE 1619, Vibration Control in Microelectronics, Optics, and Metrology, (1 February 1992); doi: 10.1117/12.56820; https://doi.org/10.1117/12.56820

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