1 February 1992 Influence of bases and benches on the performance of vibration-sensitive equipment
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Proceedings Volume 1619, Vibration Control in Microelectronics, Optics, and Metrology; (1992); doi: 10.1117/12.56828
Event: SPIE Technical: OPTCON '91, 1991, San Jose, CA, United States
Abstract
In most state-of-the-art microelectronics facilities, process equipment (tools), including vibration-sensitive equipment, is set on a structure to bring the equipment to the level of the raised access floor. Depending upon their design these bases can amplify, through resonance, the vibration amplitudes that travel from the structural floor to the equipment base. Similarly, benches that are commonly used to support microscopes and other equipment will often amplify the floor vibrations. Data are presented from recent measurements that illustrate the nature and magnitude of these effects. The concept of ''rigid body rotation'' as a source of horizontal vibration on bases and tables is discussed briefly.
© (1992) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Colin G. Gordon, Yung Q. Tran, "Influence of bases and benches on the performance of vibration-sensitive equipment", Proc. SPIE 1619, Vibration Control in Microelectronics, Optics, and Metrology, (1 February 1992); doi: 10.1117/12.56828; https://doi.org/10.1117/12.56828
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