Microvibration monitoring: some recent experiences in an operating microelectronics facility

Kevin Hassett

doi:10.1117/12.56851

1 February 1992 Microvibration monitoring: some recent experiences in an operating microelectronics facility

Kevin Hassett

Proceedings Volume 1619, Vibration Control in Microelectronics, Optics, and Metrology; (1992) https://doi.org/10.1117/12.56851
Event: SPIE Technical: OPTCON '91, 1991, San Jose, CA, United States

Abstract

Major construction work is currently underway at Intel''s Aloha, Oregon, campus. Because of concerns about the effects that construction-generated vibration might have on adjacent ongoing microelectronics manufacturing activities, two important steps were taken. The first of these was to establish guidelines that would be followed by the construction contractor to limit vibration disturbance. The second was to install a computer-based monitoring system that would continuously measure the vibration on the floor of the microelectronics manufacturing facility. In this way, the vibration effects of the construction activities would be monitored and adjusted, by modifying procedures, if necessary. The monitoring program is discussed in this paper. The major characteristics of the monitoring system, the placement of the transducers, and the ways in which the data were managed are described. Some typical data are shown and discussed.

Citation Download Citation

Kevin Hassett "Microvibration monitoring: some recent experiences in an operating microelectronics facility", Proc. SPIE 1619, Vibration Control in Microelectronics, Optics, and Metrology, (1 February 1992); https://doi.org/10.1117/12.56851

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