1 February 1992 Microvibration monitoring: some recent experiences in an operating microelectronics facility
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Major construction work is currently underway at Intel''s Aloha, Oregon, campus. Because of concerns about the effects that construction-generated vibration might have on adjacent ongoing microelectronics manufacturing activities, two important steps were taken. The first of these was to establish guidelines that would be followed by the construction contractor to limit vibration disturbance. The second was to install a computer-based monitoring system that would continuously measure the vibration on the floor of the microelectronics manufacturing facility. In this way, the vibration effects of the construction activities would be monitored and adjusted, by modifying procedures, if necessary. The monitoring program is discussed in this paper. The major characteristics of the monitoring system, the placement of the transducers, and the ways in which the data were managed are described. Some typical data are shown and discussed.
© (1992) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Kevin Hassett, Kevin Hassett, "Microvibration monitoring: some recent experiences in an operating microelectronics facility", Proc. SPIE 1619, Vibration Control in Microelectronics, Optics, and Metrology, (1 February 1992); doi: 10.1117/12.56851; https://doi.org/10.1117/12.56851

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