1 February 1992 New kind of scanning device of low mechanical vibration noises in confocal scanning optical microscope
Author Affiliations +
Proceedings Volume 1619, Vibration Control in Microelectronics, Optics, and Metrology; (1992); doi: 10.1117/12.56829
Event: SPIE Technical: OPTCON '91, 1991, San Jose, CA, United States
Abstract
In object scanning confocal microscopes the mechanical noises caused by the step motors have some effects on quality of image. This paper analyzes the mechanical noises and puts forward a new kind of system which isolates the vibration source from the scanning plate so as to minimize mechanical noises. The paper also gives some experiment results.
© (1992) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Zhang Shen, ChunKan Tao, "New kind of scanning device of low mechanical vibration noises in confocal scanning optical microscope", Proc. SPIE 1619, Vibration Control in Microelectronics, Optics, and Metrology, (1 February 1992); doi: 10.1117/12.56829; https://doi.org/10.1117/12.56829
PROCEEDINGS
4 PAGES


SHARE
RELATED CONTENT

Using wavelength change as a depth scanner to overcome the...
Proceedings of SPIE (February 01 1992)
Scanned Laser Imaging For Integrated Circuit Metrology
Proceedings of SPIE (January 02 1986)
Micromachined confocal optical microscope
Proceedings of SPIE (April 10 1996)
A CARS solution with high temporal resolution
Proceedings of SPIE (February 26 2010)
Simulation of linearity in optical microscopes
Proceedings of SPIE (June 01 1992)

Back to Top