1 February 1992 New kind of scanning device of low mechanical vibration noises in confocal scanning optical microscope
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Abstract
In object scanning confocal microscopes the mechanical noises caused by the step motors have some effects on quality of image. This paper analyzes the mechanical noises and puts forward a new kind of system which isolates the vibration source from the scanning plate so as to minimize mechanical noises. The paper also gives some experiment results.
© (1992) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Zhang Shen, ChunKan Tao, "New kind of scanning device of low mechanical vibration noises in confocal scanning optical microscope", Proc. SPIE 1619, Vibration Control in Microelectronics, Optics, and Metrology, (1 February 1992); doi: 10.1117/12.56829; https://doi.org/10.1117/12.56829
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