1 February 1992 Site selection considerations for scanning and transmission electron microscopes
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Abstract
Environmental factors must be controlled including floor vibration, acoustic level and magnetic field when choosing a site for an electron microscope. A systematic procedure for selecting a site from possible candidates is presented in this paper.
© (1992) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Wayne Vogen, Wayne Vogen, } "Site selection considerations for scanning and transmission electron microscopes", Proc. SPIE 1619, Vibration Control in Microelectronics, Optics, and Metrology, (1 February 1992); doi: 10.1117/12.56840; https://doi.org/10.1117/12.56840
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