1 February 1992 Effects of F2 concentration on the degradation of discharge-pumped KrF laser output
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Proceedings Volume 1620, Laser Testing and Reliability; (1992) https://doi.org/10.1117/12.56864
Event: SPIE Technical: OPTCON '91, 1991, San Jose, CA, United States
Abstract
By measuring the effects of halogen concentration on the lifetime of KrF excimer laser, the impurities effects on the laser output performance are analyzed. The experimental results also show that the degration of halogen concentration is related to the laser resonator conditions.
© (1992) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Qihong Lou, "Effects of F2 concentration on the degradation of discharge-pumped KrF laser output", Proc. SPIE 1620, Laser Testing and Reliability, (1 February 1992); doi: 10.1117/12.56864; https://doi.org/10.1117/12.56864
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