1 June 1992 Multidimensional modeling of excimer laser
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Abstract
The full-detailed kinetic model of XeCl laser is developed, which includes self-consistent solution of the electron Boltzmann equation, taking into account the electron collisions both with other and with vibrationally and electronically excited particles as well as the system of equations of plasma chemical kinetics and radiation transfer. 1-D, 2-D and 3-D models are worked out by simplifying the full kinetic model. The approximate kinetics have been verified to agree well with the detailed kinetics for the conditions investigated. These models have been applied to describe the effects of nonuniform pumping and spatial distribution of plasma components on the laser characteristics. The 1-D model of the electric discharge-pumped excimer laser will be presented and the results of 3-D mathematical simulation of the e-beam pumped amplifier with a large aperture will be reported. This model includes 2-D Monte- Carlo simulation of the fast electron transport and 3-D calculation of the amplified spontaneous radiation transfer. The amplified beam intensity distribution is calculated and the optical quality of the output beam is estimated, taking into account the refraction index variation across the amplifier aperture. A fast procedure to find out the laser resonator parameters for the maximal efficiency will be proposed, including the effects of spatial nonuniformity of the active medium.
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Anatoly P. Napartovich, Anatoly P. Napartovich, A. V. Dem'yanov, A. V. Dem'yanov, A. A. Deryugin, A. A. Deryugin, N. A. Dyatko, N. A. Dyatko, Igor Kochetov, Igor Kochetov, } "Multidimensional modeling of excimer laser", Proc. SPIE 1625, Design, Modeling, and Control of Laser Beam Optics, (1 June 1992); doi: 10.1117/12.58950; https://doi.org/10.1117/12.58950
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