26 June 1992 Low-energy damageless Cl2 RIBE of AlGaAs for fabricating laser diodes
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Jinzhong Yu, Manabu Hamagaki, Tamio T. Hara, Yoshinobu Aoyagi, Yoshihiko Yuba, Susumu Namba, "Low-energy damageless Cl2 RIBE of AlGaAs for fabricating laser diodes", Proc. SPIE 1634, Laser Diode Technology and Applications IV, (26 June 1992); doi: 10.1117/12.59162; https://doi.org/10.1117/12.59162
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