14 May 1992 Ultrasensitive detection of trace gases with diode lasers by frequency modulation spectroscopy
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Abstract
Frequency modulation spectroscopy (FMS) with mid- and near-infrared tunable diode lasers is an attractive approach for a number of applications that require ultrasensitive detection of trace gases. The technique combines high detection sensitivity with high detection speed and is capable of detecting numerous small molecular weight compounds at levels ranging from low parts-per-million (ppm) to sub-parts-per-billion (ppb). We will review the principles of FMS and discuss its application in areas relevant to materials processing.
© (1992) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
David E. Cooper, "Ultrasensitive detection of trace gases with diode lasers by frequency modulation spectroscopy", Proc. SPIE 1636, Applied Spectroscopy in Materials Science II, (14 May 1992); doi: 10.1117/12.59288; https://doi.org/10.1117/12.59288
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