1 May 1992 Intracavity laser spectroscopy
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The principles of intracavity laser spectroscopy (US) together with the experimental conditions which permit the detection of absorption with extremely high sensitivity are briefly described. Special attention is given to the optical parameters which need to be controlled in the U.S laser and to the observational conditions under which quantitative measurements can be made. Applications of ILS to the in situ monitoring of chemical vapor deposition of thin film materials and the quantitative characterization of absorption lines (e.g., line strengths and collisional broadening coefficients) are described. Recent results on the design and performance of solid-state ILS lasers operating in the infrared also are presented.
© (1992) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
George H. Atkinson, George H. Atkinson, } "Intracavity laser spectroscopy", Proc. SPIE 1637, Environmental and Process Monitoring Technologies, (1 May 1992); doi: 10.1117/12.59331; https://doi.org/10.1117/12.59331

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