Operation of a scanning near-field optical microscope in reflection in combination with a scanning force microscope

Niko F. van Hulst; Marco H. P. Moers; Oscar Noordman; T. Faulkner; F. B. Segerink; Kees O. van der Werf; Bart G. de Grooth; Bouwe Bolger

doi:10.1117/12.58190

1 May 1992 Operation of a scanning near-field optical microscope in reflection in combination with a scanning force microscope

Niko F. van Hulst, Marco H. P. Moers, Oscar Noordman, T. Faulkner, F. B. Segerink, Kees O. van der Werf, Bart G. de Grooth, Bouwe Bolger

Author Affiliations +

Proceedings Volume 1639, Scanning Probe Microscopies; (1992) https://doi.org/10.1117/12.58190
Event: OE/LASE '92, 1992, Los Angeles, CA, United States

Abstract

Images obtained with a scanning near field optical microscope (SNOM) operating in reflection are presented. We have obtained the first results with a SiN tip as optical probe. The instrument is simultaneously operated as a scanning force microscope (SFM). Moreover, the instrument incorporates an inverted light microscope (LM) for preselection of a scan area. The SiN probe is operated in the contact regime causing a highly improved lateral resolution in the optical image compared to an alternative set-up using a fiber probe, which is also presented. The combined microscope is operated either in open loop or as a force regulated SNOM. Near field optical images can be directly compared with the topography displayed in the simultaneously recorded SFM image.

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Niko F. van Hulst, Marco H. P. Moers, Oscar Noordman, T. Faulkner, F. B. Segerink, Kees O. van der Werf, Bart G. de Grooth, and Bouwe Bolger "Operation of a scanning near-field optical microscope in reflection in combination with a scanning force microscope", Proc. SPIE 1639, Scanning Probe Microscopies, (1 May 1992); https://doi.org/10.1117/12.58190

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