1 August 1992 Efficient Fourier image analysis algorithm for aligned rectangular and trapezoidal wafer structures
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Abstract
We present an efficient algorithm to compute the critical dimensions of aligned rectangular and trapezoidal wafer structures using images generated by a Fourier imaging system. We show that the Fourier images of aligned rectangular and trapezoidal structures are separable functions. This allows us to project them onto x and y coordinates and simplifies the computation process. We compute the critical dimensions of rectangular structures by estimating the distance between either peaks or zeros, or by estimating the distance between zeros for trapezoidal structures. For each projected 1-dimensional signal, we apply a zero- crossing technique to find the peaks or zeros, and then compute the critical dimensions at sub- pixel resolution.
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Chiao-Fe Shu, Chiao-Fe Shu, Ramesh C. Jain, Ramesh C. Jain, } "Efficient Fourier image analysis algorithm for aligned rectangular and trapezoidal wafer structures", Proc. SPIE 1661, Machine Vision Applications in Character Recognition and Industrial Inspection, (1 August 1992); doi: 10.1117/12.130300; https://doi.org/10.1117/12.130300
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