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1 June 1992 Microautomation of semiconductor fabrication
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Abstract
Micro-automation is defined as the automatic control of processes that require that relative motions be achieved with micron or submicron accuracy. This article discusses micro- automation of mechanical processes in fabrication of semiconductor devices. We identify a few applications of micro-automation, elaborate on the general system requirements, and present a specific realization of a micro-automation system which uses optical sensing and magnetic actuation.
© (1992) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Ilene J. Busch-Vishniac "Microautomation of semiconductor fabrication", Proc. SPIE 1673, Integrated Circuit Metrology, Inspection, and Process Control VI, (1 June 1992); https://doi.org/10.1117/12.59817
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