1 June 1992 Optical 3-D monitoring VLSI structures
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Abstract
Phase object pattern analysis has shown the possibility of considerably increasing microscope spatial resolution. Experiments have revealed more than ten times resolution enhancement. Some phase object images inside an Airy disk are presented.
© (1992) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Vladimir P. Tychinsky, Vladimir P. Tychinsky, Alexander V. Tavrov, Alexander V. Tavrov, } "Optical 3-D monitoring VLSI structures", Proc. SPIE 1673, Integrated Circuit Metrology, Inspection, and Process Control VI, (1 June 1992); doi: 10.1117/12.59838; https://doi.org/10.1117/12.59838
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