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1 June 1992 Positive-tone surface imaging: methodologies for analysis and process control
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A variety of analytical and process control techniques have been employed during process development activities for a 0.5 micrometers deep UV positive tone surface imaging process. Examples of applications of these methods for identification of primary positive tone surface imaging issues and process optimization for enhancement of ultimate resolution are described. Advantages and limitations for each technique are discussed.
© (1992) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Susan K. Jones, Peter Freeman, Edward K. Pavelchek, John F. Bohland, Bruce W. Dudley, and Gary S. Calabrese "Positive-tone surface imaging: methodologies for analysis and process control", Proc. SPIE 1673, Integrated Circuit Metrology, Inspection, and Process Control VI, (1 June 1992);

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