Fabrication and evaluation of chromium/phase-shifter/quartz structure phase-shift mask

Tadao Yasuzato; Haruo Iwasaki; Hiroshi Nozue; Kunihiko Kasama

doi:10.1117/12.130324

1 June 1992 Fabrication and evaluation of chromium/phase-shifter/quartz structure phase-shift mask

Tadao Yasuzato, Haruo Iwasaki, Hiroshi Nozue, Kunihiko Kasama

Proceedings Volume 1674, Optical/Laser Microlithography V; (1992) https://doi.org/10.1117/12.130324
Event: Microlithography '92, 1992, San Jose, CA, United States

Abstract

The deviation of phase shift angle from 180° seriously deteriorates the focus latitude. In order to obtain the expected performance of phase shift mask, a Chromium(Cr)/Phase-Shifter/Quartz(Qz) structure is investigated. In this phase shift mask structure, the shifter thickness i.e., phase shift angle, can be precisely controlled, compared with a conventional Shifter/Cr/Qz structure. Spin-on-grass(SOG) is used as the phase shifter material because of its excellent thickness uniformity. Alternating phase shift mask that has the Cr/SOG/Qz structure was fabricated using Ar-laser writing method, and evaluated using a NA=0.45, 6=0.3-0.5,I-line stepper. Obtained results show that this phase shift mask structure is very promising for the subhalfmicron pattern formation.

Citation Download Citation

Tadao Yasuzato, Haruo Iwasaki, Hiroshi Nozue, and Kunihiko Kasama "Fabrication and evaluation of chromium/phase-shifter/quartz structure phase-shift mask", Proc. SPIE 1674, Optical/Laser Microlithography V, (1 June 1992); https://doi.org/10.1117/12.130324

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