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1 June 1992 New design of silicon organic materials and processes for microelectronics (Invited Paper)
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Abstract
In present time six types of siliconorganic materials are commonly used in microelectronic, technology: polysiloxanes, polysilozanes, polysilmethylenes, polysilphenylenes, organic polymers with silicon getheroathorns and polysilanes [1].
© (1992) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
P. A. Averichkin, A. I. Maslakov, Kamil A. Valiev, and Leonid V. Velikov "New design of silicon organic materials and processes for microelectronics (Invited Paper)", Proc. SPIE 1674, Optical/Laser Microlithography V, (1 June 1992); https://doi.org/10.1117/12.130374
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