1 June 1992 Novel laser microlithography system
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A novelmicrolithographysystem with high precision and high performance is suggested in this paper. In the system, sub-micrometer focused laser beam was used to carve spot by spot on a disk, which was covered by photoresist and was mounted on a uniform turning stage. Pre-designed pattern can be obtained by two dimensional scanning which was realized by using a high precision turning stage and a high precision radial moving stage. The system has the advantages of high speed ( > 10meter sec for single laser beam), high precision (angle precision better than 0.2"), simple structure and using low price objective. We can not only make very large pattern (> 1011pixels), but also make a set of (eg. 5-6 pieces) masks using in LSIC production on one disk. Detailed principles and performances of the microlithography system will be introduced in this paper.
© (1992) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Guan-Qun Shen, Guan-Qun Shen, Binchu Wu, Binchu Wu, Kangzhe Cai, Kangzhe Cai, Xuanshao Huang, Xuanshao Huang, Paiqi Cao, Paiqi Cao, "Novel laser microlithography system", Proc. SPIE 1674, Optical/Laser Microlithography V, (1 June 1992); doi: 10.1117/12.130358; https://doi.org/10.1117/12.130358


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