Compact and high-speed ellipsometer

Akira Kazama; Yoshiro Yamada; Takeo Yamada; Takahiko Oshige; Tomoyuki Kaneko; Akio Nagamune

doi:10.1117/12.137734

14 August 1992 Compact and high-speed ellipsometer

Akira Kazama, Yoshiro Yamada, Takeo Yamada, Takahiko Oshige, Tomoyuki Kaneko, Akio Nagamune

Proceedings Volume 1681, Optically Based Methods for Process Analysis; (1992) https://doi.org/10.1117/12.137734
Event: SPIE's 1992 Symposium on Process Control and Monitoring, 1992, Somerset, NJ, United States

Abstract

A compact and high-speed ellipsometer system with a new ellipsometric analyzer has been developed. Its size is 130 X 65 X 25 mm, and the weight 400 g including a light source and analyzers with no moving part. With an automatic x-(theta) stage, it takes only 20 seconds to obtain an area distribution map of a thin film-thickness on a 8-inch wafer at 2 mm pitch of 6,000 points. Its compactness and high-speed might make it widely applicable to various processes.

Citation Download Citation

Akira Kazama, Yoshiro Yamada, Takeo Yamada, Takahiko Oshige, Tomoyuki Kaneko, and Akio Nagamune "Compact and high-speed ellipsometer", Proc. SPIE 1681, Optically Based Methods for Process Analysis, (14 August 1992); https://doi.org/10.1117/12.137734

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available