Producibility of uncooled IRFPA detectors

Robert A. Owen; Steve N. Frank; Chuck Daz

doi:10.1117/12.137780

12 August 1992 Producibility of uncooled IRFPA detectors

Robert A. Owen, Steve N. Frank, Chuck Daz

Proceedings Volume 1683, Infrared Focal Plane Array Producibility and Related Materials; (1992) https://doi.org/10.1117/12.137780
Event: Aerospace Sensing, 1992, Orlando, FL, United States

Abstract

Demonstrated detectivity of uncooled infrared focal plane arrays is better than O.1°K noise equivalent temperature difference, Uncooled performance levels are now suitable for military and commercial applications. The manufacturing science of this technology lags that for mercury cadmium tellurium based cooled focal planes. The manufacturing issues and approaches for ferroelectric material based uncooled detectors are discussed. The recommended approach is to address producibility issues based on pareto analysis of the process flow and to address the most highly leveraged process steps in terms of time and labor input. Detailed modeling of the process flow has been undertaken as a part of this analysis. Processes addressed in detail are lap and polish of the detector, photolithography, metallization, etches, hybridization, and test. Several approaches are shown to yield comparable cost focal planes, but a process technology leveraging silicon process technologies is shown to minimize space and equipment.

Citation Download Citation

Robert A. Owen, Steve N. Frank, and Chuck Daz "Producibility of uncooled IRFPA detectors", Proc. SPIE 1683, Infrared Focal Plane Array Producibility and Related Materials, (12 August 1992); https://doi.org/10.1117/12.137780

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