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1 September 1992 Pyroelectric IR single-element detectors and arrays based on LiNbO3 and LiTaO3
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Abstract
Starting from a characterization of the used pyroelectric materials LiNbO3 and LiTaO3 the paper describes the hybrid arrangement and essential properties of realized single- element detectors and arrays. It shows that the design and the production technique of pyroelectric chips have a strong influence on the thermal and spatial resolution of the detectors. This technique includes both the thinning process and reticulation of the chips, for which ion beam milling as a universal method was optimized and used. Single-element detectors with extremely thin, self-supporting LiTaO3 chips (dp < 2 micrometers ) were produced. With a responsive element of 2 X 2 mm2 in area, they have a specific detectivity D* (500 K; 10 Hz; 25 degree(s)C) > 1 X 109 cmHz1/2W-1. Linear arrays with 128 responsive elements of 90 X 100 micrometers 2 element size, 100 micrometers pitch, integrated readout circuit, and coated germanium window have a noise equivalent power (NEP) (500 K; 40 Hz; 25 degree(s)C) of 4 nW. The modulation transfer function MTFS (40 Hz; 31 p/mm; 25 degree(s)C) is 0.15 for pyroelectric chips without isolating grooves and was increased up to 0.45 by means of ion- beam milling of 10 micrometers wide isolating grooves between the responsive elements. First results of two-dimensional arrays with 128 X 128 elements, of 50 micrometers pitch and integrated CCD-readout circuit are presented.
© (1992) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Volkmar Norkus, Guenter Hofmann, Silke Moehling, and Helmut Budzier "Pyroelectric IR single-element detectors and arrays based on LiNbO3 and LiTaO3", Proc. SPIE 1685, Infrared Detectors and Focal Plane Arrays II, (1 September 1992); https://doi.org/10.1117/12.137791
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