Pyroelectric IR single-element detectors and arrays based on LiNbO3 and LiTaO3

Volkmar Norkus; Guenter Hofmann; Silke Moehling; Helmut Budzier

doi:10.1117/12.137791

1 September 1992 Pyroelectric IR single-element detectors and arrays based on LiNbO₃ and LiTaO₃

Volkmar Norkus, Guenter Hofmann, Silke Moehling, Helmut Budzier

Proceedings Volume 1685, Infrared Detectors and Focal Plane Arrays II; (1992) https://doi.org/10.1117/12.137791
Event: Aerospace Sensing, 1992, Orlando, FL, United States

Abstract

Starting from a characterization of the used pyroelectric materials LiNbO₃ and LiTaO₃ the paper describes the hybrid arrangement and essential properties of realized single- element detectors and arrays. It shows that the design and the production technique of pyroelectric chips have a strong influence on the thermal and spatial resolution of the detectors. This technique includes both the thinning process and reticulation of the chips, for which ion beam milling as a universal method was optimized and used. Single-element detectors with extremely thin, self-supporting LiTaO₃ chips (dp < 2 micrometers ) were produced. With a responsive element of 2 X 2 mm² in area, they have a specific detectivity D^* (500 K; 10 Hz; 25 degree(s)C) > 1 X 10⁹ cmHz^1/2W^-1. Linear arrays with 128 responsive elements of 90 X 100 micrometers ² element size, 100 micrometers pitch, integrated readout circuit, and coated germanium window have a noise equivalent power (NEP) (500 K; 40 Hz; 25 degree(s)C) of 4 nW. The modulation transfer function MTF_S (40 Hz; 31 p/mm; 25 degree(s)C) is 0.15 for pyroelectric chips without isolating grooves and was increased up to 0.45 by means of ion- beam milling of 10 micrometers wide isolating grooves between the responsive elements. First results of two-dimensional arrays with 128 X 128 elements, of 50 micrometers pitch and integrated CCD-readout circuit are presented.

Citation Download Citation

Volkmar Norkus, Guenter Hofmann, Silke Moehling, and Helmut Budzier "Pyroelectric IR single-element detectors and arrays based on LiNbO₃ and LiTaO₃", Proc. SPIE 1685, Infrared Detectors and Focal Plane Arrays II, (1 September 1992); https://doi.org/10.1117/12.137791

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