Beginning the design of a UV microscope objective

David M. Aikens

doi:10.1117/12.138010

16 September 1992 Beginning the design of a UV microscope objective

David M. Aikens

Proceedings Volume 1690, Design of Optical Instruments; (1992) https://doi.org/10.1117/12.138010
Event: Aerospace Sensing, 1992, Orlando, FL, United States

Abstract

In any lens design problem, the first and most important step in the design process is the selection of the best design starting point, or design form, for the problem at hand. While many publications are available which address the selection of a design form for common optical problems, there is little available in the literature to assist the optical designer who is performing a conceptual design trade off in specialized areas of interest, such as UV microscopy. Given the advancement of short wavelength systems utilized in the semiconductor manufacturing industry, where the short wavelength is used in conjunction with high numerical apertures to provide increasingly smaller spot sizes, the once esoteric field of UV microscope objective design has moved to the forefront of the theater of optical design. This paper addresses the fundamental differences between the available UV objective starting points in the broadest possible terms within the context of varied system level constraints, and is intended to serve the designer as a vehicle for selecting the design form which will best suit the task at hand.

Citation Download Citation

David M. Aikens "Beginning the design of a UV microscope objective", Proc. SPIE 1690, Design of Optical Instruments, (16 September 1992); https://doi.org/10.1117/12.138010

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available