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1 July 1992 Ferroelectric thin-film materials, structures, and microsensors
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Abstract
The paper describes the integration of sol-gel ferroelectric thin films into micromachined sensors and optical detectors, devices which are based on the piezoelectric and pyroelectric effects in Pb(Zr(x)Ti(1-x))O3 and PbTiO3 thin films, respectively. The ferroelectric and surface-micromachining technologies are described, which are compatible with 3-micron CMOS technology. At 297 K and a chopping frequency of 50 Hz, the measured blackbody voltage responsivity of a pyroelectric element with an active area of 7 x 10 exp -4 sq cm was 4.2 x 10 exp 4 V/W and the measured normalized detectivity was 1.0 x 10 exp 9 cm sq-rt Hz/W.
© (1992) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Dennis L. Polla, T. Tamagawa, Chian-Ping Ye, P. J. Schiller, Linda Pham, and Cuong Y. Tu "Ferroelectric thin-film materials, structures, and microsensors", Proc. SPIE 1694, Sensors and Sensor Systems for Guidance and Navigation II, (1 July 1992); https://doi.org/10.1117/12.138119
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