1 July 1992 Integrated microgyroscope
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Abstract
A feasibility study was conducted of a prototype electrostatically suspended micromechanical two-axis gyroscope on a microchip, which is expected to find many applications in commercial, aerospace, and military sectors. Particular attention is given to the microfabrication techniques used for this device, the specifications and the configuration of the gyroscope, the configurations of the motor and the sensor, the electromechanical design, and the control and electronics design. Results of the feasibility study were very promising.
© (1992) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Timothy J. Hawkey, Timothy J. Hawkey, Richard P. Torti, Richard P. Torti, } "Integrated microgyroscope", Proc. SPIE 1694, Sensors and Sensor Systems for Guidance and Navigation II, (1 July 1992); doi: 10.1117/12.138139; https://doi.org/10.1117/12.138139
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