1 July 1992 Microfabricated magnetometer using Young's modulus changes in magnetoelastic materials
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Recent advances in tunneling-tip technology, magnetic materials, and microfabrication techniques allow development of a new class of improved magnetometers. The sensor utilizes changes in Young's modulus of amorphous magnetic alloys resulting from their excellent magnetoelastic properties. Changes in applied magnetic field cause resonant frequency changes of a sputtered, electrostatically excited Metglass cantilever. Resonant cantilever position is measured by a second, electrostatically controlled cantilever holding a tunneling-tip that tracks the Metglas cantilever. The phase relationship between the exciting signal and the position is fed back to maintain the excitation frequency at the moving resonant peak. In this way the resonant frequency is measured, and the field is inferred from the frequency. The 'Q' of the Metglas cantilever is increased to very high levels using closed loop control of cantilever dynamics, producing extraordinary resolution.
© (1992) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Ralph C. Fenn, Ralph C. Fenn, Michael J. Gerver, Michael J. Gerver, Richard L. Hockney, Richard L. Hockney, Bruce G. Johnson, Bruce G. Johnson, John L. Wallace, John L. Wallace, } "Microfabricated magnetometer using Young's modulus changes in magnetoelastic materials", Proc. SPIE 1694, Sensors and Sensor Systems for Guidance and Navigation II, (1 July 1992); doi: 10.1117/12.138115; https://doi.org/10.1117/12.138115

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