Thin film diamond temperature sensor array for harsh aerospace environment

Mohammad Aslam; Ashraf Masood; Ronald J. Fredricks; Mike A. Tamor

doi:10.1117/12.138121

1 July 1992 Thin film diamond temperature sensor array for harsh aerospace environment

Mohammad Aslam, Ashraf Masood, Ronald J. Fredricks, Mike A. Tamor

Author Affiliations +

Proceedings Volume 1694, Sensors and Sensor Systems for Guidance and Navigation II; (1992) https://doi.org/10.1117/12.138121
Event: Aerospace Sensing, 1992, Orlando, FL, United States

Abstract

The feasibility of using polycrystalline CVD diamond films as temperature sensors in harsh aerospace environment associated with hypersonic flights was tested using patterned diamond resistors, fabricated on flat or curved oxidized Si surfaces, as temperature sensors at temperatures between 20 and 1000 C. In this temperature range, the measured resistance was found to vary over 3 orders of magnitude and the temperature coefficient of resistance to change from 0.017/K to 0.003/K. After an annealing treatment, the resistance change was reproducible within 1 percent on the entire temperature range for short measuring times.

Citation Download Citation

Mohammad Aslam, Ashraf Masood, Ronald J. Fredricks, and Mike A. Tamor "Thin film diamond temperature sensor array for harsh aerospace environment", Proc. SPIE 1694, Sensors and Sensor Systems for Guidance and Navigation II, (1 July 1992); https://doi.org/10.1117/12.138121

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