2 December 1992 High-performance surface-emitting lasers with dry-etched facets
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The fabrication, performance characteristics, and applications of monolithic in-plane surface-emitting lasers (IPSELs) with dry-etched 45-degree micromirrors are reviewed. Several types of such laser diode structures in both junction-up and junction-down configurations are considered. The performance goals for IPSELs with 45-degree micromirrors are high power and efficiency, high duty cycle and CW operation, good reliability, and high fabrication yields. The proposed approach for achieving these goals includes uniform quantum well material growth and dry etching of the laser micromirrors with tight fabrication tolerances.
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Szutsun Simon Ou, Szutsun Simon Ou, Michael Jansen, Michael Jansen, Jane J. Yang, Jane J. Yang, Moshe Sergant, Moshe Sergant, Luke J. Mawst, Luke J. Mawst, Dan Botez, Dan Botez, Thomas J. Roth, Thomas J. Roth, Cynthia A. Hess, Cynthia A. Hess, Chan Tu, Chan Tu, "High-performance surface-emitting lasers with dry-etched facets", Proc. SPIE 1703, Optical Technology for Microwave Applications VI and Optoelectronic Signal Processing for Phased-Array Antennas III, (2 December 1992); doi: 10.1117/12.138375; https://doi.org/10.1117/12.138375

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