2 December 1992 Phosphosilicate glass waveguides for phased-array radar time delay
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Abstract
The design, fabrication, and performance characteristics of passive waveguides and micromechanical switches for use as time delays for phased-array antennas are discussed. The approach considered here is to fabricate the optical waveguides and switches on silicon substrates using VLSI-compatible technology. This approach permits the use of a single off-chip emitter and detector to perform RF-optical and optical-RF conversion for each delay network. It also allows precise lithographic definition of the shorter delay waveguides. Micromechanical waveguide routing switches of two types designed to perform the path selection functions are considered.
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Gregory A. Magel, Gregory A. Magel, Jerry L. Leonard, Jerry L. Leonard, "Phosphosilicate glass waveguides for phased-array radar time delay", Proc. SPIE 1703, Optical Technology for Microwave Applications VI and Optoelectronic Signal Processing for Phased-Array Antennas III, (2 December 1992); doi: 10.1117/12.138405; https://doi.org/10.1117/12.138405
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