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5 January 1993 Design of diffractive optical elements for CO2-laser material processing
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Proceedings Volume 1718, Workshop on Digital Holography; (1993) https://doi.org/10.1117/12.138564
Event: Workshop on Digital Holography, 1992, Prague, Czech Republic
Abstract
In this paper we report on the design of diffractive optical elements (DOEs) for high power laser radiation. We modified the Fourier transform algorithm which allows hologram calculation also for reflective type Kinoforms considering the tilted arrangement. To achieve light weighted DOEs which are resistend against intense laser radiation reflective DOEs in silicon were fabricated. The elements have been investigated with respect to the diffraction efficiency and the absorption values.
© (1993) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Christoph Haupt, M. Pahlke, E. Jaeger, and Hans J. Tiziani "Design of diffractive optical elements for CO2-laser material processing", Proc. SPIE 1718, Workshop on Digital Holography, (5 January 1993); doi: 10.1117/12.138564; https://doi.org/10.1117/12.138564
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