20 October 1992 Advancements in one-dimensional profiling with a long-trace profiler
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Proceedings Volume 1720, Intl Symp on Optical Fabrication, Testing, and Surface Evaluation; (1992) https://doi.org/10.1117/12.132173
Event: International Symposium on Optical Fabrication, Testing, and Surface Evaluation, 1992, Tokyo, Japan
Abstract
Over the last several years the long trace profiler (LTP) has been evolving into a sophisticated machine capable of measuring surface profiles of very long dimensions. This report explains improvements, both hardware and software, that have helped to achieve accuracies and ranges in surface profiling that have been unobtainable until now. A comparison made by measuring standard optical surfaces on other instruments corroborates these accuracies.
© (1992) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Steven C. Irick, Steven C. Irick, Wayne R. McKinney, Wayne R. McKinney, "Advancements in one-dimensional profiling with a long-trace profiler", Proc. SPIE 1720, Intl Symp on Optical Fabrication, Testing, and Surface Evaluation, (20 October 1992); doi: 10.1117/12.132173; https://doi.org/10.1117/12.132173
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