Application of a fringe scanning method to zone-plate interferometry

Takashi Nomura; Hiroshi Miyashiro; Kazuhide Kamiya; Kazuo Yoshikawa; Hatsuzo Tashiro; Shigeo Ozono; Masane Suzuki

doi:10.1117/12.132139

20 October 1992 Application of a fringe scanning method to zone-plate interferometry

Takashi Nomura, Hiroshi Miyashiro, Kazuhide Kamiya, Kazuo Yoshikawa, Hatsuzo Tashiro, Shigeo Ozono, Masane Suzuki

Proceedings Volume 1720, Intl Symp on Optical Fabrication, Testing, and Surface Evaluation; (1992) https://doi.org/10.1117/12.132139
Event: International Symposium on Optical Fabrication, Testing, and Surface Evaluation, 1992, Tokyo, Japan

Abstract

Fringe scanning for analyzing shape error of a test surface is performed by fringe shift of interference images with different phases. The method of proposed fringe shift is carried out by a zone-plate, which has fan-shaped sections of four different initial phases of 0, (pi) /4, (pi) /2, and 3(pi) /4. Experimental results agree with the theory.

Citation Download Citation

Takashi Nomura, Hiroshi Miyashiro, Kazuhide Kamiya, Kazuo Yoshikawa, Hatsuzo Tashiro, Shigeo Ozono, and Masane Suzuki "Application of a fringe scanning method to zone-plate interferometry", Proc. SPIE 1720, Intl Symp on Optical Fabrication, Testing, and Surface Evaluation, (20 October 1992); https://doi.org/10.1117/12.132139

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