Design, fabrication, and polarization of soft x-ray transmission       multilayers

Hiroshi Nomura; Kou Mayama; Takuya Sasaki; Masaki Yamamoto; Mihiro Yanagihara

doi:10.1117/12.132147

20 October 1992 Design, fabrication, and polarization of soft x-ray transmission multilayers

Hiroshi Nomura, Kou Mayama, Takuya Sasaki, Masaki Yamamoto, Mihiro Yanagihara

Proceedings Volume 1720, Intl Symp on Optical Fabrication, Testing, and Surface Evaluation; (1992) https://doi.org/10.1117/12.132147
Event: International Symposium on Optical Fabrication, Testing, and Surface Evaluation, 1992, Tokyo, Japan

Abstract

Soft-x-ray transmission multilayers have been designed and fabricated for use as polarizing elements. Polarization performance of the multilayers has been studied at a photon energy of 97 eV by rotating analyzer ellipsometry with a multilayer reflection polarizer. The transmission multilayers were found to be a good polarizer of 99.2% polarizance and a phase shifter of 90 degree(s) retardation with equal transmission ratio (5:3) and high throughput around 10%.

Citation Download Citation

Hiroshi Nomura, Kou Mayama, Takuya Sasaki, Masaki Yamamoto, and Mihiro Yanagihara "Design, fabrication, and polarization of soft x-ray transmission multilayers", Proc. SPIE 1720, Intl Symp on Optical Fabrication, Testing, and Surface Evaluation, (20 October 1992); https://doi.org/10.1117/12.132147

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