20 October 1992 Design, fabrication, and polarization of soft x-ray transmission multilayers
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Proceedings Volume 1720, Intl Symp on Optical Fabrication, Testing, and Surface Evaluation; (1992) https://doi.org/10.1117/12.132147
Event: International Symposium on Optical Fabrication, Testing, and Surface Evaluation, 1992, Tokyo, Japan
Abstract
Soft-x-ray transmission multilayers have been designed and fabricated for use as polarizing elements. Polarization performance of the multilayers has been studied at a photon energy of 97 eV by rotating analyzer ellipsometry with a multilayer reflection polarizer. The transmission multilayers were found to be a good polarizer of 99.2% polarizance and a phase shifter of 90 degree(s) retardation with equal transmission ratio (5:3) and high throughput around 10%.
© (1992) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Hiroshi Nomura, Hiroshi Nomura, Kou Mayama, Kou Mayama, Takuya Sasaki, Takuya Sasaki, Masaki Yamamoto, Masaki Yamamoto, Mihiro Yanagihara, Mihiro Yanagihara, } "Design, fabrication, and polarization of soft x-ray transmission multilayers", Proc. SPIE 1720, Intl Symp on Optical Fabrication, Testing, and Surface Evaluation, (20 October 1992); doi: 10.1117/12.132147; https://doi.org/10.1117/12.132147
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