20 October 1992 Development of new instrument detecting integrated intensity fluctuations for surface roughness measurements
Author Affiliations +
Proceedings Volume 1720, Intl Symp on Optical Fabrication, Testing, and Surface Evaluation; (1992) https://doi.org/10.1117/12.132113
Event: International Symposium on Optical Fabrication, Testing, and Surface Evaluation, 1992, Tokyo, Japan
Abstract
A new method to measure the surface roughness under a fully developed speckle pattern illumination has been proposed. This technique is used on the basis that the roughness depends on the speckle size of doubly scattered light and the size can be determined from the spatial fluctuations of the integrated intensity over a finite area. Using the CCD camera as a photodetector, the proposed system can determine the roughness at on-line.
© (1992) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Eiichi Miyazaki, Kunifumi Nakanishi, Takeaki Yoshimura, "Development of new instrument detecting integrated intensity fluctuations for surface roughness measurements", Proc. SPIE 1720, Intl Symp on Optical Fabrication, Testing, and Surface Evaluation, (20 October 1992); doi: 10.1117/12.132113; https://doi.org/10.1117/12.132113
PROCEEDINGS
8 PAGES


SHARE
Back to Top