20 October 1992 Error sources in phase-measuring interferometry (Invited Paper)
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Proceedings Volume 1720, Intl Symp on Optical Fabrication, Testing, and Surface Evaluation; (1992) https://doi.org/10.1117/12.132150
Event: International Symposium on Optical Fabrication, Testing, and Surface Evaluation, 1992, Tokyo, Japan
Abstract
Phase-measurement interferometry (PMI) techniques enable quantitative measurements to be performed in optical testing, holographic interferometry, and speckle metrology. This paper presents the results of error analyses of the most common errors in phase-measurement techniques. These errors include miscalibrated and nonlinear phase shifters, detector nonlinearities, detection quantization, vibration and air turbulence, and frequency mixing. Simulations providing the magnitude and form of these errors are shown for a number of different phase-measurement algorithms.
© (1992) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Katherine Creath, "Error sources in phase-measuring interferometry (Invited Paper)", Proc. SPIE 1720, Intl Symp on Optical Fabrication, Testing, and Surface Evaluation, (20 October 1992); doi: 10.1117/12.132150; https://doi.org/10.1117/12.132150
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