20 October 1992 Fabrication and testing of x-ray optical elements
Author Affiliations +
Proceedings Volume 1720, Intl Symp on Optical Fabrication, Testing, and Surface Evaluation; (1992) https://doi.org/10.1117/12.132177
Event: International Symposium on Optical Fabrication, Testing, and Surface Evaluation, 1992, Tokyo, Japan
Fabrication and test of optical elements at shortwave bands is one of the essential subjects in research of x-ray optics technology. This paper describes the background and purpose for developing x-ray optics technology, and the characteristics and requirements of fabricating elements and their application. Progress on research of fabrication and test of optical elements at x-ray wave band, mainly in Changchun Institute of Fine Mechanics, Chinese Academy of Sciences, is briefly described and several examples are given in this paper. Fabrication techniques and test methods on the substrates of fused quartz spherical laminar gratings, scanning cylindrical mirrors for x-ray photolithography used for synchrotronization radiation beam line, and the x-ray multiple layer monochromater are emphasized. Results obtained indicate that roughness of the super-smooth surfaces of optical elements is up to 0.1 nm rms.
© (1992) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Changxin Zhou, Changxin Zhou, } "Fabrication and testing of x-ray optical elements", Proc. SPIE 1720, Intl Symp on Optical Fabrication, Testing, and Surface Evaluation, (20 October 1992); doi: 10.1117/12.132177; https://doi.org/10.1117/12.132177


Light-weight glass mirror systems for future x-ray telescopes
Proceedings of SPIE (September 25 2013)
Design and fabrication of a conical mirror for hard x...
Proceedings of SPIE (August 17 1995)
Fabrication And Test Of X-Ray Optics
Proceedings of SPIE (November 26 1989)
Research on the measuring method of the slope error of...
Proceedings of SPIE (November 26 2007)
Fabrication of an aspherical mirror for soft x ray optics...
Proceedings of SPIE (October 28 1998)

Back to Top