20 October 1992 Fabrication and testing of x-ray telescope
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Proceedings Volume 1720, Intl Symp on Optical Fabrication, Testing, and Surface Evaluation; (1992) https://doi.org/10.1117/12.132145
Event: International Symposium on Optical Fabrication, Testing, and Surface Evaluation, 1992, Tokyo, Japan
Abstract
A float polishing method used for final polishing of a cylindrical grazing incident x-ray telescope component is described in this paper. The workpiece is initially made by a diamond turning machine. A small polisher moves along the axis of the component to be worked. Dwell time and stroke length in different position of the component are controlled by the error contour of the component given by the measurement. The polisher is made in a special way and has good flexibility to match the curvature change of different portions of the component to be fabricated and has enough hardness to keep the efficiency of the polishing process. The polisher is immersed into the aluminum oxide solution diluted by distilled water with 9 - 11 PH. The conditions and parameters of the polishing process are given in the paper. The shape of the mirror is checked by a narrow block of sphere master which contacts with the workpiece at four points of two ends of the component. A computer program is written for calculating ideal distribution of interferometric pattern and for treating real pattern formed between the master and the workpiece to give the error of the component. The roughness, which is higher than 1.5 nm rms has been reached by this method, the roundness of the component is less than 40 nm and the error of the form of the component is about 150 nm. Modulation transfer function (MTF) of the final assembly is measured with visible light to make sure that the telescope has correct assembly and the result is given in the paper.
© (1992) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Jingchi Yu, Xiafei Sun, Zhangnan Huang, "Fabrication and testing of x-ray telescope", Proc. SPIE 1720, Intl Symp on Optical Fabrication, Testing, and Surface Evaluation, (20 October 1992); doi: 10.1117/12.132145; https://doi.org/10.1117/12.132145
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