20 October 1992 Fabrication of lenslet grating with multilevel phases
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Proceedings Volume 1720, Intl Symp on Optical Fabrication, Testing, and Surface Evaluation; (1992) https://doi.org/10.1117/12.132161
Event: International Symposium on Optical Fabrication, Testing, and Surface Evaluation, 1992, Tokyo, Japan
Abstract
Lenslet arrays with eight-level phases are fabricated by the method of etching and film coating, respectively. The diffraction efficiency of that component is about 80%. Two types of lenslet grating are constructed, the one is a lenslet array with a pinhole grating, and the other is a combination of two sets of lenslet arrays. The homogeneity of the array spots obtained by a lenslet grating is better than that by a single lenslet array. The fabrication process and the testing method are described, some experimental results are listed.
© (1992) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Yingbai Yan, Yingbai Yan, Xu Wang, Xu Wang, Changkun Yao, Changkun Yao, Guofan Jin, Guofan Jin, Minxian Wu, Minxian Wu, } "Fabrication of lenslet grating with multilevel phases", Proc. SPIE 1720, Intl Symp on Optical Fabrication, Testing, and Surface Evaluation, (20 October 1992); doi: 10.1117/12.132161; https://doi.org/10.1117/12.132161
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