20 October 1992 HOE interferometer for cylindrical surface
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Proceedings Volume 1720, Intl Symp on Optical Fabrication, Testing, and Surface Evaluation; (1992); doi: 10.1117/12.132180
Event: International Symposium on Optical Fabrication, Testing, and Surface Evaluation, 1992, Tokyo, Japan
Abstract
We have developed a new HOE interferometer for testing cylindrical surfaces. The HOE is a reflection type and a plane mirror is used to compensate irregularity of HOE's surface. The grating pattern on the HOE was calculated by a computer. And the HOE was fabricated by an electron beam lithography system. This HOE acts as a diffraction element of cylindrical wave and also as a reflector of plane wave. The main frame of our HOE interferometer is a commercial Fizeau type interferometer. So operation is very easy.
© (1992) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Yoshitaka Minami, Kenji Yasuda, "HOE interferometer for cylindrical surface", Proc. SPIE 1720, Intl Symp on Optical Fabrication, Testing, and Surface Evaluation, (20 October 1992); doi: 10.1117/12.132180; https://doi.org/10.1117/12.132180
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KEYWORDS
Holographic optical elements

Interferometers

Mirrors

Chlorine

Diffraction

Electron beams

Reflection

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