Translator Disclaimer
20 October 1992 Measurement of phase change of light on reflection
Author Affiliations +
Proceedings Volume 1720, Intl Symp on Optical Fabrication, Testing, and Surface Evaluation; (1992) https://doi.org/10.1117/12.132151
Event: International Symposium on Optical Fabrication, Testing, and Surface Evaluation, 1992, Tokyo, Japan
Abstract
A sample consisting of different metals in the same plane is fabricated, and its surface profile is measured by interferometry. In spite of the flat surface, a virtual step height (max. value equals 33 nm) is measured at the boundary of the two adjacent metals. The measured step height corresponds to the difference in the phase change of reflected light between the two metals. From the results, the effect of the phase change on surface profilometry is estimated.
© (1992) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Takuma Doi, Kouji Toyoda, and Yoshihisa Tanimura "Measurement of phase change of light on reflection", Proc. SPIE 1720, Intl Symp on Optical Fabrication, Testing, and Surface Evaluation, (20 October 1992); https://doi.org/10.1117/12.132151
PROCEEDINGS
8 PAGES


SHARE
Advertisement
Advertisement
RELATED CONTENT


Back to Top