Method for measuring small displacements by using an electro-optic modulator

Li-Horng Shyu; Chieh-Li Chen; Der-Chin Su

doi:10.1117/12.132176

20 October 1992 Method for measuring small displacements by using an electro-optic modulator

Li-Horng Shyu, Chieh-Li Chen, Der-Chin Su

Proceedings Volume 1720, Intl Symp on Optical Fabrication, Testing, and Surface Evaluation; (1992) https://doi.org/10.1117/12.132176
Event: International Symposium on Optical Fabrication, Testing, and Surface Evaluation, 1992, Tokyo, Japan

Abstract

A new method for measuring small displacements is presented. An electro-optic modulator is used to mix a carrier frequency to the reference signal and the test signals. By measuring the phase difference between these two signals, the displacements can be evaluated. It has the same high resolution as the heterodyne interferometer, and can be operated in real-time.

Citation Download Citation

Li-Horng Shyu, Chieh-Li Chen, and Der-Chin Su "Method for measuring small displacements by using an electro-optic modulator", Proc. SPIE 1720, Intl Symp on Optical Fabrication, Testing, and Surface Evaluation, (20 October 1992); https://doi.org/10.1117/12.132176

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available