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20 October 1992 Method for measuring small displacements by using an electro-optic modulator
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Proceedings Volume 1720, Intl Symp on Optical Fabrication, Testing, and Surface Evaluation; (1992) https://doi.org/10.1117/12.132176
Event: International Symposium on Optical Fabrication, Testing, and Surface Evaluation, 1992, Tokyo, Japan
Abstract
A new method for measuring small displacements is presented. An electro-optic modulator is used to mix a carrier frequency to the reference signal and the test signals. By measuring the phase difference between these two signals, the displacements can be evaluated. It has the same high resolution as the heterodyne interferometer, and can be operated in real-time.
© (1992) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Li-Horng Shyu, Chieh-Li Chen, and Der-Chin Su "Method for measuring small displacements by using an electro-optic modulator", Proc. SPIE 1720, Intl Symp on Optical Fabrication, Testing, and Surface Evaluation, (20 October 1992); https://doi.org/10.1117/12.132176
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