Modern surface technique and its valuation on ultraprecise metrology  grating

Lin Chen

doi:10.1117/12.132164

20 October 1992 Modern surface technique and its valuation on ultraprecise metrology grating

Lin Chen

Proceedings Volume 1720, Intl Symp on Optical Fabrication, Testing, and Surface Evaluation; (1992) https://doi.org/10.1117/12.132164
Event: International Symposium on Optical Fabrication, Testing, and Surface Evaluation, 1992, Tokyo, Japan

Abstract

The new technique on the surface of ultra-precise metrology grating advanced in this paper actually is a type of the process of protective covering for the ruled grating. After discussing the effect of the surface technique on the target of grating homogeneity error, and evaluating three types of the traditional surface techniques, it is evident that the modern surface technique, J-D protective covering, is best in practice.

Citation Download Citation

Lin Chen "Modern surface technique and its valuation on ultraprecise metrology grating", Proc. SPIE 1720, Intl Symp on Optical Fabrication, Testing, and Surface Evaluation, (20 October 1992); https://doi.org/10.1117/12.132164

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